Magnetization losses in submicrometer CoFeB dots etched in a high ion density Cl2-based plasma

C.G.C.H.M Fabrie, JT Kohlhepp, HJM Swagten, B Koopmans, MSP Andriesse

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	2627-2630
Number of pages	4
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	24
Publication status	Published - 2006

Keywords

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title = "Magnetization losses in submicrometer CoFeB dots etched in a high ion density Cl2-based plasma",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "C.G.C.H.M Fabrie and JT Kohlhepp and HJM Swagten and B Koopmans and MSP Andriesse",

year = "2006",

language = "Undefined/Unknown",

volume = "24",

pages = "2627--2630",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

}

TY - JOUR

T1 - Magnetization losses in submicrometer CoFeB dots etched in a high ion density Cl2-based plasma

AU - Fabrie, C.G.C.H.M

AU - Kohlhepp, JT

AU - Swagten, HJM

AU - Koopmans, B

AU - Andriesse, MSP

PY - 2006

Y1 - 2006

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 1071-1023

VL - 24

SP - 2627

EP - 2630

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

ER -