Original language | Undefined/Unknown |
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Patent number | PCT/NL/98/00297 |
IPC | Aangevraagd in 1998. |
Priority date | 1/01/00 |
Publication status | Published - 1999 |
Mapper concept, a hybrid deep-UV and electron projection lithography system for the 0.1 mm.
P Kruit (Inventor)
Research output: Patent