MAPPER: high throughput maskless lithography

E Slot, M.J.J. Wieland, G de Boer, P Kruit, GF ten Berge

Research output: Contribution to journal › Conference article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	69211P-1-69211P-9
Journal	Proceedings of SPIE- International Society for Optical Engineering
Volume	6921
Publication status	Published - 2008

Keywords

@article{d0c4e8ab14574e9d9672461b8306ab73,

title = "MAPPER: high throughput maskless lithography",

keywords = "Peer-lijst tijdschrift",

author = "E Slot and M.J.J. Wieland and {de Boer}, G and P Kruit and {ten Berge}, GF",

year = "2008",

language = "Undefined/Unknown",

volume = "6921",

pages = "69211P--1--69211P--9",

journal = "Proceedings of SPIE- International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - MAPPER: high throughput maskless lithography

AU - Slot, E

AU - Wieland, M.J.J.

AU - de Boer, G

AU - Kruit, P

AU - ten Berge, GF

PY - 2008

Y1 - 2008

KW - Peer-lijst tijdschrift

M3 - Conference article

SN - 0277-786X

VL - 6921

SP - 69211P-1-69211P-9

JO - Proceedings of SPIE- International Society for Optical Engineering

JF - Proceedings of SPIE- International Society for Optical Engineering

ER -