Original language | Undefined/Unknown |
---|---|
Journal | Microelectronic Engineering |
Volume | 33 |
Publication status | Published - 1997 |
Mechanical Reliability of CVD-Copper Thin Films
JF Jongste, JP Lokker, GCAM Janssen, S Radelaar, J Torres, J Palleau
Research output: Contribution to journal › Article › Scientific › peer-review
6
Citations
(Scopus)