Mechanics of Ultra-Sensitive Nanoelectromechanical Silicon Cantilevers. A Combined Experimental-Theoretical Approach

H Sadeghian Marnani

Research output: Thesis › Dissertation (TU Delft)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	van Keulen, A., Supervisor Bossche, A., Advisor Tabata, O, Advisor, External person Qu, J, Advisor, External person Rixen, Daniel, Advisor
Award date	15 Dec 2010
Place of Publication	nn
Publisher	nn
Print ISBNs	978-94-91104-05-3
Publication status	Published - 2010

Keywords

@phdthesis{f7a9e913c44b407badb55c52beb89f8d,

title = "Mechanics of Ultra-Sensitive Nanoelectromechanical Silicon Cantilevers. A Combined Experimental-Theoretical Approach",

keywords = "Elektrotechniek, Techniek, authored books, Diss. prom. aan TU Delft",

author = "{Sadeghian Marnani}, H",

year = "2010",

language = "English",

isbn = "978-94-91104-05-3",

publisher = "nn",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}