Original language | Undefined/Unknown |
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Pages (from-to) | 406-410 |
Number of pages | 5 |
Journal | Thin Solid Films |
Volume | 290/291 |
Publication status | Published - 1996 |
Modeling of selective tungsten LPCVD
KJ Kuijlaars, CR Kleijn, HEA van den Akker
Research output: Contribution to journal › Article › Scientific › peer-review