Modelling of metal nanoimprinting

Y Zhang

Research output: Thesis › Dissertation (TU Delft)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Thijsse, Barend, Supervisor Nicola, Lucia, Advisor
Award date	19 May 2014
Print ISBNs	978-94-6259-206-3
DOIs	https://doi.org/10.4233/uuid:1d2cffb7-c5d4-4c13-9e97-7a1c12cf9ae8
Publication status	Published - 2014

Keywords

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