Original language | Undefined/Unknown |
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Qualification | Doctor of Philosophy |
Awarding Institution |
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Supervisors/Advisors |
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Award date | 20 Jan 1997 |
Place of Publication | Delft |
Publication status | Published - 1997 |
Mo/Si multilayer optics for micro-lithography
HJ Voorma
Research output: Thesis › Dissertation (TU Delft)