Mo/Si multilayer optics for micro-lithography

HJ Voorma

    Research output: ThesisDissertation (TU Delft)

    Original languageUndefined/Unknown
    QualificationDoctor of Philosophy
    Awarding Institution
    • Delft University of Technology
    Supervisors/Advisors
    • Radelaar, S, Supervisor
    • van der Wiel, MJ, Advisor, External person
    Award date20 Jan 1997
    Place of PublicationDelft
    Publication statusPublished - 1997

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