Nano-engineering with a focused helium ion beam

D.J. Maas, EWJM van der Drift, E van Veldhoven, JH Meessen, M Rudneva, PFA Alkemade

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

12 Citations (Scopus)

Original language	English
Title of host publication	MRS Online Proceedings Library
Editors	G Marletta, A Öztarhan, J Baglin, D Ila
Place of Publication	s.l.
Publisher	Cambridge University Press
Pages	1-14
Number of pages	14
Publication status	Published - 2012
Event	Symposium II: Ion Beams--New Applications from Mesoscale to Nanoscale, San Francisco - s.l. Duration: 25 Apr 2011 → 29 Apr 2011

Name
Publisher	Cambridge University Press

Name
Volume	1354

Conference	Symposium II: Ion Beams--New Applications from Mesoscale to Nanoscale, San Francisco
Period	25/04/11 → 29/04/11

Cite this

@inproceedings{f3a2a731bafe41cbb81cdf3ab2446c11,

title = "Nano-engineering with a focused helium ion beam",

author = "D.J. Maas and {van der Drift}, EWJM and Veldhoven, {E van} and JH Meessen and M Rudneva and PFA Alkemade",

year = "2012",

language = "English",

publisher = "Cambridge University Press",

pages = "1--14",

editor = "G Marletta and A {\"O}ztarhan and J Baglin and D Ila",

booktitle = "MRS Online Proceedings Library",

address = "United Kingdom",

note = "Symposium II: Ion Beams--New Applications from Mesoscale to Nanoscale, San Francisco ; Conference date: 25-04-2011 Through 29-04-2011",

}

TY - GEN

T1 - Nano-engineering with a focused helium ion beam

AU - Maas, D.J.

AU - van der Drift, EWJM

AU - Veldhoven, E van

AU - Meessen, JH

AU - Rudneva, M

AU - Alkemade, PFA

PY - 2012

Y1 - 2012

M3 - Conference contribution

SP - 1

EP - 14

BT - MRS Online Proceedings Library

A2 - Marletta, G

A2 - Öztarhan, A

A2 - Baglin, J

A2 - Ila, D

PB - Cambridge University Press

CY - s.l.

T2 - Symposium II: Ion Beams--New Applications from Mesoscale to Nanoscale, San Francisco

Y2 - 25 April 2011 through 29 April 2011

ER -