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Non-linear bulk micromachined accelerometer for high sensitivity applications. / Middelburg, L.M.; Mansouri, B. El; Poelma, Rene; Zhang, G.Q.; van Zeijl, Henk; Wei, Jia.

2018 IEEE SENSORS Proceedings. ed. / A. Roy; Y. Gianchandani. Vol. 2018-October Piscataway, NJ : IEEE, 2018. p. 1-4 8589630.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Harvard

Middelburg, LM, Mansouri, BE, Poelma, R, Zhang, GQ, van Zeijl, H & Wei, J 2018, Non-linear bulk micromachined accelerometer for high sensitivity applications. in A Roy & Y Gianchandani (eds), 2018 IEEE SENSORS Proceedings. vol. 2018-October, 8589630, IEEE, Piscataway, NJ, pp. 1-4, IEEE Sensors 2018, New Delhi, India, 28/10/18. https://doi.org/10.1109/ICSENS.2018.8589630

APA

Middelburg, L. M., Mansouri, B. E., Poelma, R., Zhang, G. Q., van Zeijl, H., & Wei, J. (2018). Non-linear bulk micromachined accelerometer for high sensitivity applications. In A. Roy, & Y. Gianchandani (Eds.), 2018 IEEE SENSORS Proceedings (Vol. 2018-October, pp. 1-4). [8589630] Piscataway, NJ: IEEE. https://doi.org/10.1109/ICSENS.2018.8589630

Vancouver

Middelburg LM, Mansouri BE, Poelma R, Zhang GQ, van Zeijl H, Wei J. Non-linear bulk micromachined accelerometer for high sensitivity applications. In Roy A, Gianchandani Y, editors, 2018 IEEE SENSORS Proceedings. Vol. 2018-October. Piscataway, NJ: IEEE. 2018. p. 1-4. 8589630 https://doi.org/10.1109/ICSENS.2018.8589630

Author

Middelburg, L.M. ; Mansouri, B. El ; Poelma, Rene ; Zhang, G.Q. ; van Zeijl, Henk ; Wei, Jia. / Non-linear bulk micromachined accelerometer for high sensitivity applications. 2018 IEEE SENSORS Proceedings. editor / A. Roy ; Y. Gianchandani. Vol. 2018-October Piscataway, NJ : IEEE, 2018. pp. 1-4

BibTeX

@inproceedings{cb60696d11f44e07adc42aca485f3b87,
title = "Non-linear bulk micromachined accelerometer for high sensitivity applications",
abstract = "This work describes the design, modelling and realisation of the mechanical part of a non-linear MEMS accelerometer intended for large displacement behaviour. For this, a mass/spring system was designed with an extremely low resonance frequency. In this work the mechanical behaviour was verified by measurements done using an optical setup, including a laser and photodiode. The results are a resonance frequency of 12.6 Hz, which can be further tuned depending on the application by varying the mass, beam thickness and tilt of the structure. This results in a mechanical sensitivity of 0.16 [mm/ms-2]. The future goal of this work is to integrate a read-out scheme on wafer level, for example electrostatically.",
keywords = "accelerometer, large displacement behaviour, non-linear MEMS, optical readout",
author = "L.M. Middelburg and Mansouri, {B. El} and Rene Poelma and G.Q. Zhang and {van Zeijl}, Henk and Jia Wei",
note = "Accepted author manuscript",
year = "2018",
doi = "10.1109/ICSENS.2018.8589630",
language = "English",
isbn = "978-1-5386-4708-0",
volume = "2018-October",
pages = "1--4",
editor = "A. Roy and Y. Gianchandani",
booktitle = "2018 IEEE SENSORS Proceedings",
publisher = "IEEE",
address = "United States",

}

RIS

TY - GEN

T1 - Non-linear bulk micromachined accelerometer for high sensitivity applications

AU - Middelburg, L.M.

AU - Mansouri, B. El

AU - Poelma, Rene

AU - Zhang, G.Q.

AU - van Zeijl, Henk

AU - Wei, Jia

N1 - Accepted author manuscript

PY - 2018

Y1 - 2018

N2 - This work describes the design, modelling and realisation of the mechanical part of a non-linear MEMS accelerometer intended for large displacement behaviour. For this, a mass/spring system was designed with an extremely low resonance frequency. In this work the mechanical behaviour was verified by measurements done using an optical setup, including a laser and photodiode. The results are a resonance frequency of 12.6 Hz, which can be further tuned depending on the application by varying the mass, beam thickness and tilt of the structure. This results in a mechanical sensitivity of 0.16 [mm/ms-2]. The future goal of this work is to integrate a read-out scheme on wafer level, for example electrostatically.

AB - This work describes the design, modelling and realisation of the mechanical part of a non-linear MEMS accelerometer intended for large displacement behaviour. For this, a mass/spring system was designed with an extremely low resonance frequency. In this work the mechanical behaviour was verified by measurements done using an optical setup, including a laser and photodiode. The results are a resonance frequency of 12.6 Hz, which can be further tuned depending on the application by varying the mass, beam thickness and tilt of the structure. This results in a mechanical sensitivity of 0.16 [mm/ms-2]. The future goal of this work is to integrate a read-out scheme on wafer level, for example electrostatically.

KW - accelerometer

KW - large displacement behaviour

KW - non-linear MEMS

KW - optical readout

UR - http://www.scopus.com/inward/record.url?scp=85060867057&partnerID=8YFLogxK

U2 - 10.1109/ICSENS.2018.8589630

DO - 10.1109/ICSENS.2018.8589630

M3 - Conference contribution

SN - 978-1-5386-4708-0

VL - 2018-October

SP - 1

EP - 4

BT - 2018 IEEE SENSORS Proceedings

A2 - Roy, A.

A2 - Gianchandani, Y.

PB - IEEE

CY - Piscataway, NJ

ER -

ID: 51655507