Novel Design Methods for High-Quality Lithographic Objectives.

OE Marinescu

Research output: Thesis › Dissertation (TU Delft)

Original language	Undefined/Unknown
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Braat, Joseph, Supervisor
Award date	22 Jun 2006
Place of Publication	Delft
Publisher	Sieca Repro
Print ISBNs	90-78314-02-8
Publication status	Published - 2006

Keywords

@phdthesis{8c232e36c20f481789e25f676d16ef63,

title = "Novel Design Methods for High-Quality Lithographic Objectives.",

keywords = "Diss. prom. aan TU Delft",

author = "OE Marinescu",

year = "2006",

language = "Undefined/Unknown",

isbn = "90-78314-02-8",

publisher = "Sieca Repro",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}