Optical design of a combined ion and electron beam system for nanotechnology

PWH Jager, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	3753-3758
Number of pages	6
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	14
Issue number	6
Publication status	Published - 1996

Cite this

@article{1da82055abcd4172ba89d0399862d0e9,

title = "Optical design of a combined ion and electron beam system for nanotechnology",

author = "PWH Jager and P Kruit",

year = "1996",

language = "Undefined/Unknown",

volume = "14",

pages = "3753--3758",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}

TY - JOUR

T1 - Optical design of a combined ion and electron beam system for nanotechnology

AU - Jager, PWH

AU - Kruit, P

PY - 1996

Y1 - 1996

M3 - Article

SN - 1071-1023

VL - 14

SP - 3753

EP - 3758

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 6

ER -