Pattern dependency of pure-boron-layer chemical-vapor depositions

V Mohammadi, WB De Boer, TLM Scholtes, LK Nanver

Research output: Contribution to journal › Conference article › Scientific › peer-review

4 Citations (Scopus)

Keywords

@article{819b55569e0a468faa02dd9cb576a2d4,

title = "Pattern dependency of pure-boron-layer chemical-vapor depositions",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "V Mohammadi and {De Boer}, WB and TLM Scholtes and LK Nanver",

year = "2012",

doi = "10.1149/1.3700937",

language = "English",

volume = "45",

pages = "39--48",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "Electrochemical Society, Inc.",

number = "6",

}

TY - JOUR

T1 - Pattern dependency of pure-boron-layer chemical-vapor depositions

AU - Mohammadi, V

AU - De Boer, WB

AU - Scholtes, TLM

AU - Nanver, LK

PY - 2012

Y1 - 2012

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

U2 - 10.1149/1.3700937

DO - 10.1149/1.3700937

M3 - Conference article

SN - 1938-5862

VL - 45

SP - 39

EP - 48

JO - ECS Transactions

JF - ECS Transactions

IS - 6

ER -