Polymeric (PEDOT:PSS) strain gauges embedded in PDMS membranes fabricated using a full wafer-scale fabrication process capable of realizing reproducible small features, are reported. The devices are characterized using a customized setup, which provides mechanical stretch while dynamically reading the electrical resistance. Measurements show relative resistance changes of approximately 11% for applied pressure up to 4 kPa. The process described is tailored to fabricate pressure sensors and microelectrodes for a flexible substrate-based Organ-on-Chip platform.

Original languageEnglish
Title of host publicationTransducers 2017
Subtitle of host publication19th International Conference on Solid-State Sensors, Actuators, and Microsystems
EditorsW. Fang, C.P. Hung, S. Shoji
Place of PublicationPiscataway, NJ
Number of pages4
ISBN (Electronic)978-1-5386-2731-0
ISBN (Print)978-1-5386-2732-7
Publication statusPublished - 2017
EventTransducers 2017: 19th International Conference on Solid-State Sensors, Actuators and Microsystems - Kaohsiung, Taiwan, Province of China
Duration: 18 Jun 201722 Jun 2017


ConferenceTransducers 2017
Abbreviated titleTransducers'17
CountryTaiwan, Province of China

    Research areas

  • Membrane, Organ-on-Chip, Polydimethylsiloxane, Polymeric, Pressure, Resistance, Strain-Gauge

ID: 29530860