Polymide sacrificial layer for an all-dry post-process surface micromachining module

TMH Pham; A Bagolini; CR de Boer; JMW Laros; L Pakula; PJ French; PM Sarro

Polymide sacrificial layer for an all-dry post-process surface micromachining module

TMH Pham, A Bagolini, CR de Boer, JMW Laros, L Pakula, PJ French, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	TRANSDUCERS'03 Twelfth International conference on solid-state sensors, acuators and microsystems
Editors	s.n.
Place of Publication	Piscataway
Publisher	IEEE Society
Pages	813-816
Number of pages	4
ISBN (Print)	0-7803-7731-1
Publication status	Published - 2003
Event	Twelfth international conference on solid-state sensors, acuators and microsystems, Boston, Mass. USA - Piscataway Duration: 8 Jun 2003 → 12 Jun 2003

Publication series

Name
Publisher	IEEE

Conference

Conference	Twelfth international conference on solid-state sensors, acuators and microsystems, Boston, Mass. USA
Period	8/06/03 → 12/06/03

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{f45eb5eb73d346589c6abd11d8bc2246,

title = "Polymide sacrificial layer for an all-dry post-process surface micromachining module",

keywords = "Conf.proc. > 3 pag",

author = "TMH Pham and A Bagolini and {de Boer}, CR and JMW Laros and L Pakula and PJ French and PM Sarro",

year = "2003",

language = "Undefined/Unknown",

isbn = "0-7803-7731-1",

publisher = "IEEE Society",

pages = "813--816",

editor = "s.n.",

booktitle = "TRANSDUCERS'03 Twelfth International conference on solid-state sensors, acuators and microsystems",

note = "Twelfth international conference on solid-state sensors, acuators and microsystems, Boston, Mass. USA ; Conference date: 08-06-2003 Through 12-06-2003",

}

Pham, TMH, Bagolini, A, de Boer, CR , Laros, JMW , Pakula, L , French, PJ & Sarro, PM 2003, Polymide sacrificial layer for an all-dry post-process surface micromachining module. in s.n. (ed.), TRANSDUCERS'03 Twelfth International conference on solid-state sensors, acuators and microsystems. IEEE Society, Piscataway, pp. 813-816, Twelfth international conference on solid-state sensors, acuators and microsystems, Boston, Mass. USA, 8/06/03.

Polymide sacrificial layer for an all-dry post-process surface micromachining module. / Pham, TMH; Bagolini, A; de Boer, CR et al.
TRANSDUCERS'03 Twelfth International conference on solid-state sensors, acuators and microsystems. ed. / s.n. Piscataway: IEEE Society, 2003. p. 813-816.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Polymide sacrificial layer for an all-dry post-process surface micromachining module

AU - Pham, TMH

AU - Bagolini, A

AU - de Boer, CR

AU - Laros, JMW

AU - Pakula, L

AU - French, PJ

AU - Sarro, PM

PY - 2003

Y1 - 2003

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0-7803-7731-1

SP - 813

EP - 816

BT - TRANSDUCERS'03 Twelfth International conference on solid-state sensors, acuators and microsystems

A2 - s.n., null

PB - IEEE Society

CY - Piscataway

T2 - Twelfth international conference on solid-state sensors, acuators and microsystems, Boston, Mass. USA

Y2 - 8 June 2003 through 12 June 2003

ER -