Positioning More-than-Moore characterization needs within the 2011 ITRS

MWM Graef

doi:10.1063/1.3657913

Positioning More-than-Moore characterization needs within the 2011 ITRS

MWM Graef

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

6 Citations (Scopus)

Original language	English
Title of host publication	Frontiers of Characterization and Metrology for Nanoelectronics 2011
Editors	D Seiler, A Diebold, B McDonald, et al.
Place of Publication	Grenoble, France
Publisher	AIP Publishing
Pages	345-350
Number of pages	6
ISBN (Print)	978-0-7354-0965-1
DOIs	https://doi.org/10.1063/1.3657913
Publication status	Published - 2011
Event	Frontiers of Characterization and Metrology for Nanoelectronics 2011 - Grenoble, France Duration: 23 May 2011 → 26 May 2011

Publication series

Name
Publisher	AIP

Name	AIP Conference Proceedings
Volume	1395
ISSN (Print)	0094-243X

Conference

Conference	Frontiers of Characterization and Metrology for Nanoelectronics 2011
Period	23/05/11 → 26/05/11

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Access to Document

10.1063/1.3657913

Cite this

@inproceedings{7b8b831acf8b4fbf9e74cfb57292412f,

title = "Positioning More-than-Moore characterization needs within the 2011 ITRS",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "MWM Graef",

year = "2011",

doi = "10.1063/1.3657913",

language = "English",

isbn = "978-0-7354-0965-1",

publisher = "AIP Publishing",

pages = "345--350",

editor = "D Seiler and A Diebold and B McDonald and {et al.}",

booktitle = "Frontiers of Characterization and Metrology for Nanoelectronics 2011",

note = "Frontiers of Characterization and Metrology for Nanoelectronics 2011 ; Conference date: 23-05-2011 Through 26-05-2011",

}

Graef, MWM 2011, Positioning More-than-Moore characterization needs within the 2011 ITRS. in D Seiler, A Diebold, B McDonald & et al. (eds), Frontiers of Characterization and Metrology for Nanoelectronics 2011. AIP Conference Proceedings, vol. 1395, AIP Publishing, Grenoble, France, pp. 345-350, Frontiers of Characterization and Metrology for Nanoelectronics 2011, 23/05/11. https://doi.org/10.1063/1.3657913

Positioning More-than-Moore characterization needs within the 2011 ITRS. / Graef, MWM.
Frontiers of Characterization and Metrology for Nanoelectronics 2011. ed. / D Seiler; A Diebold; B McDonald; et al. Grenoble, France: AIP Publishing, 2011. p. 345-350 (AIP Conference Proceedings; Vol. 1395).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Positioning More-than-Moore characterization needs within the 2011 ITRS

AU - Graef, MWM

PY - 2011

Y1 - 2011

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

U2 - 10.1063/1.3657913

DO - 10.1063/1.3657913

M3 - Conference contribution

SN - 978-0-7354-0965-1

SP - 345

EP - 350

BT - Frontiers of Characterization and Metrology for Nanoelectronics 2011

A2 - Seiler, D

A2 - Diebold, A

A2 - McDonald, B

A2 - et al., null

PB - AIP Publishing

CY - Grenoble, France

T2 - Frontiers of Characterization and Metrology for Nanoelectronics 2011

Y2 - 23 May 2011 through 26 May 2011

ER -