Projection lens arrangement

JJ Wieland (Inventor), BJ Kampherbeek (Inventor), AHV van Veen (Inventor), P Kruit (Inventor), SWHK Steenbrink (Inventor)

    Research output: Patent

    Original languageFrench
    Patent numberEP 2279515 B1
    IPCH01L, B82Y, H01J, G03F, G01J, G21K
    Priority date28/02/08
    Publication statusPublished - 2011

    Bibliographical note

    Patent: ?
    Applicant: TU Delft, MAPPER LITHOGRAPHY IP B.V.

    Keywords

    • Octrooi
    • Projection Lens arrangement

      Wieland, MJJ., Kampherbeek, BJ., van Veen, A. H., Kruit, P. & Steenbrink, S. W. H. K., 2009, IPC No. H01L, B82Y, H01J, G03F, G01J, G21K, Priority date 28 Feb 2008, Priority No. WO 2009106397 A1

      Research output: Patent

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