Research output per year
Research output per year
JJ Wieland (Inventor), BJ Kampherbeek (Inventor), AHV van Veen (Inventor), P Kruit (Inventor), SWHK Steenbrink (Inventor)
Research output: Patent
Original language | French |
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Patent number | EP 2279515 B1 |
IPC | H01L, B82Y, H01J, G03F, G01J, G21K |
Priority date | 28/02/08 |
Publication status | Published - 2011 |
Research output: Patent