PVD Aluminium Nitride as Heat Spreader in Silicon-On-Glass Technology

L La Spina; H Schellevis; N Nenadovic; LK Nanver

PVD Aluminium Nitride as Heat Spreader in Silicon-On-Glass Technology

L La Spina, H Schellevis, N Nenadovic, LK Nanver

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

4 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	Proceedings of IEEE International Conference on Microelectronics
Editors	s.n.
Place of Publication	Belgrade, Serbia
Publisher	Electron Device Society
Pages	365-368
Number of pages	4
ISBN (Print)	1-4244-0116-x
Publication status	Published - 2006
Event	IEEE International Conference on Microelectronics - Belgrade, Serbia Duration: 14 May 2006 → 17 May 2006

Publication series

Name
Publisher	Electron Device Society

Name
Volume	2

Conference

Conference	IEEE International Conference on Microelectronics
Period	14/05/06 → 17/05/06

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{f65961907ad348e28b292bc1da71bc56,

title = "PVD Aluminium Nitride as Heat Spreader in Silicon-On-Glass Technology",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "{La Spina}, L and H Schellevis and N Nenadovic and LK Nanver",

year = "2006",

language = "Undefined/Unknown",

isbn = "1-4244-0116-x",

publisher = "Electron Device Society",

pages = "365--368",

editor = "s.n.",

booktitle = "Proceedings of IEEE International Conference on Microelectronics",

note = "IEEE International Conference on Microelectronics ; Conference date: 14-05-2006 Through 17-05-2006",

}

PVD Aluminium Nitride as Heat Spreader in Silicon-On-Glass Technology. / La Spina, L; Schellevis, H; Nenadovic, N et al.
Proceedings of IEEE International Conference on Microelectronics. ed. / s.n. Belgrade, Serbia: Electron Device Society, 2006. p. 365-368.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - PVD Aluminium Nitride as Heat Spreader in Silicon-On-Glass Technology

AU - La Spina, L

AU - Schellevis, H

AU - Nenadovic, N

AU - Nanver, LK

PY - 2006

Y1 - 2006

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 1-4244-0116-x

SP - 365

EP - 368

BT - Proceedings of IEEE International Conference on Microelectronics

A2 - s.n., null

PB - Electron Device Society

CY - Belgrade, Serbia

T2 - IEEE International Conference on Microelectronics

Y2 - 14 May 2006 through 17 May 2006

ER -