@article{0d83424225904468869756d0432be855,
title = "Quantification of the atomic hydrogen flux as a function of filament temperature and H2 flow rate",
keywords = "CWTS JFIS < 0.75",
author = "D Ugur and A Storm and R Verberk and JC Brouwer and WG Sloof",
year = "2012",
language = "Undefined/Unknown",
volume = "30",
pages = "1--6",
journal = "Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "3",
}