Quantum Noise Effects in e-Beam Lithography and Metrology

Thomas Verduin

Research output: Thesis › Dissertation (TU Delft)

622 Downloads (Pure)

Original language	English
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Kruit, P., Supervisor Hagen, C.W., Advisor
Award date	18 Jan 2017
Print ISBNs	978-94-6186-782-7
DOIs	https://doi.org/10.4233/uuid:f214f594-a21f-4318-9f29-9776d60ab06c
Publication status	Published - 2017

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@phdthesis{f214f594a21f43189f299776d60ab06c,

title = "Quantum Noise Effects in e-Beam Lithography and Metrology",

author = "Thomas Verduin",

year = "2017",

doi = "10.4233/uuid:f214f594-a21f-4318-9f29-9776d60ab06c",

language = "English",

isbn = "978-94-6186-782-7",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}