@inproceedings{fb9b270a992343e2863ee0f27e007fae,
title = "Recent progress in technology and applications of membrane micromachined deformable mirrors",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "G Vdovin and PM Sarro and F Gont{\'e} and N Collings and R Dandliker",
year = "1999",
language = "Undefined/Unknown",
isbn = "0-8194-3246-6",
publisher = "International Society for Optical Engineering",
pages = "2--11",
editor = "{JD Gonglewski} and {MA Vorontsov}",
booktitle = "Proceedings of SPIE, vol. 3760",
note = "High-resolution wavefront control: methods, devices and applications, Denver ; Conference date: 18-07-1999 Through 23-07-1999",
}