Original language | Undefined/Unknown |
---|---|
Title of host publication | Conference Proceedings of the Fourth European Conference on Residual Stresses. |
Pages | 577-584 |
Number of pages | 8 |
Publication status | Published - 1998 |
Relaxation of internal stresses in chemically vapour deposited TiN/TiB2 double layers.
J te Nijenhuis, R Delhez, JGM Becht, Th.H de Keijser, EJ Mittemeijer
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review