Robust Fabrication method for silicon nanowire field effect transistors for sensing applications

M Mescher, LCPM de Smet, EJR Sudholter, JH Klootwijk

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	5649-5653
Number of pages	5
Journal	Journal of Nanoscience and Nanotechnology
Volume	13
Publication status	Published - 2013

Cite this

@article{be6db68f6531477383296756205605b2,

title = "Robust Fabrication method for silicon nanowire field effect transistors for sensing applications",

author = "M Mescher and {de Smet}, LCPM and EJR Sudholter and JH Klootwijk",

year = "2013",

language = "Undefined/Unknown",

volume = "13",

pages = "5649--5653",

journal = "Journal of Nanoscience and Nanotechnology",

issn = "1533-4880",

publisher = "American Scientific Publishers",

}