Original language | Undefined/Unknown |
---|---|
Pages (from-to) | 1971-1982 |
Number of pages | 12 |
Journal | Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures |
Volume | 16 |
Issue number | 4 |
Publication status | Published - 1998 |
Secondary ion mass spectrometry and atomic force spectroscopy studies of surface roughening, erosion rate change and depth resolurion in Si during 1 keV 60 degrees O2+ bombardment with oxygen flooding
ZX Jiang, PFA Alkemade
Research output: Contribution to journal › Article › Scientific › peer-review
50
Citations
(Scopus)