@inproceedings{15516bb971ef41b6b7acb629bad0c080,
title = "Shallow trench insulation for SiGe Heterojunction bipolar transistors with 25% Ge epitaxial base",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "{van Zeijl}, HW and LK Nanver",
year = "2001",
language = "Undefined/Unknown",
isbn = "90-73461-29-4",
publisher = "STW Technology Foundation",
pages = "224--228",
booktitle = "SAFE 2001: proceedings CD-ROM",
note = "Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven ; Conference date: 28-11-2001 Through 30-11-2001",
}