Silicon carbide thin films for MEMS nanoreactors for in-situ transmission electron microscopy

Research output: ThesisDissertation (TU Delft)

Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • Sarro, P.M., Supervisor
  • Creemer, Fredrik, Advisor
Award date10 Jul 2015
Place of PublicationDelft
Publisher
Print ISBNs978-94-6186-504-5
DOIs
Publication statusPublished - 2015

Keywords

  • Diss. prom. aan TU Delft

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