Silicon micro-accelerometer with mg resolution, high linearity and large frequency bandwidth fabricated with two mask bulk process

Z Xiao, Min Chen, Guoying Wu, Changde Zhao, Dacheng Zhang, Yilong Hao, Guobing Zhang, ZH Li

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	113-119
Number of pages	7
Journal	Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume	77
Publication status	Published - 1999

Keywords

@article{9332e6dc80a542999c42b29e2a5a5d96,

title = "Silicon micro-accelerometer with mg resolution, high linearity and large frequency bandwidth fabricated with two mask bulk process",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "Z Xiao and Min Chen and Guoying Wu and Changde Zhao and Dacheng Zhang and Yilong Hao and Guobing Zhang and ZH Li",

year = "1999",

language = "Undefined/Unknown",

volume = "77",

pages = "113--119",

journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",

issn = "0924-4247",

publisher = "Elsevier",

}

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Silicon micro-accelerometer with mg resolution, high linearity and large frequency bandwidth fabricated with two mask bulk process

AU - Xiao, Z

AU - Chen, Min

AU - Wu, Guoying

AU - Zhao, Changde

AU - Zhang, Dacheng

AU - Hao, Yilong

AU - Zhang, Guobing

AU - Li, ZH

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Article

SN - 0924-4247

VL - 77

SP - 113

EP - 119

JO - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

JF - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

ER -