Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
EditorsL Buchaillot, H Zappe et al
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages1344-1347
Number of pages4
ISBN (Print)978-146730324-8
DOIs
Publication statusPublished - 2012
EventMEMS 2012; Paris, France - Piscataway, NJ, USA
Duration: 29 Jan 20122 Feb 2012

Publication series

Name
PublisherIEEE

Conference

ConferenceMEMS 2012; Paris, France
Period29/01/122/02/12

ID: 3057367