Silver-based reflective coatings for micromachined optical filters

Research output: Contribution to journal › Article › Scientific

Original language	Undefined/Unknown
Pages (from-to)	162-165
Number of pages	4
Journal	Journal of Micromechanics and Microengineering
Volume	9
Publication status	Published - 1999

Keywords

@article{f4bf5b358fc84bfdb0cd56018d1cfb91,

title = "Silver-based reflective coatings for micromachined optical filters",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "M Bartek and JHG Correia and RF Wolffenbuttel",

year = "1999",

language = "Undefined/Unknown",

volume = "9",

pages = "162--165",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

}