Simulation of selective tungsten chemical vapour deposition (a section of Solid State Electronics)

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	43-54
Number of pages	12
Journal	Materials Science in Semiconductor Processing
Volume	1
Publication status	Published - 1998

Cite this

@article{e9ad492a31cd4b5bbd976070bc593f3f,

title = "Simulation of selective tungsten chemical vapour deposition (a section of Solid State Electronics)",

author = "KJ Kuijlaars and CR Kleijn and {van den Akker}, HEA",

year = "1998",

language = "Undefined/Unknown",

volume = "1",

pages = "43--54",

journal = "Materials Science in Semiconductor Processing",

issn = "1369-8001",

publisher = "Elsevier",

}