Single step cryogenic SF6/O2 plasma etching process for the development of inertial devices

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of SeSens 2002
Place of Publication	Utrecht
Publisher	STW Stichting voor de Technische Wetenschappen
Pages	612-614
Number of pages	3
ISBN (Print)	90-73461-33-2
Publication status	Published - 2002
Event	SeSens 2002 SAFE2002 ProRISC 2002 Veldhoven, the Netherlands - Utrecht Duration: 29 Nov 2002 → 29 Nov 2002

Name
Publisher	STW Stichting voor de Technische Wetenschappen

Conference	SeSens 2002 SAFE2002 ProRISC 2002 Veldhoven, the Netherlands
Period	29/11/02 → 29/11/02

Keywords

@inproceedings{8e2f4be178c545c58b74b4a2c264587e,

title = "Single step cryogenic SF6/O2 plasma etching process for the development of inertial devices",

keywords = "Elektrotechniek, Techniek, Geen BTA classificatie",

author = "G Craciun and H Yang and {van Zeijl}, HW and L Pakula and MA Blauw and {van der Drift}, EWJM and PJ French",

year = "2002",

language = "Undefined/Unknown",

isbn = "90-73461-33-2",

publisher = "STW Stichting voor de Technische Wetenschappen",

pages = "612--614",

booktitle = "Proceedings of SeSens 2002",

note = "SeSens 2002 SAFE2002 ProRISC 2002 Veldhoven, the Netherlands ; Conference date: 29-11-2002 Through 29-11-2002",

}

TY - GEN

T1 - Single step cryogenic SF6/O2 plasma etching process for the development of inertial devices

AU - Craciun, G

AU - Yang, H

AU - van Zeijl, HW

AU - Pakula, L

AU - Blauw, MA

AU - van der Drift, EWJM

AU - French, PJ

PY - 2002

Y1 - 2002

KW - Elektrotechniek

KW - Techniek

KW - Geen BTA classificatie

M3 - Conference contribution

SN - 90-73461-33-2

SP - 612

EP - 614

BT - Proceedings of SeSens 2002

PB - STW Stichting voor de Technische Wetenschappen

CY - Utrecht

T2 - SeSens 2002 SAFE2002 ProRISC 2002 Veldhoven, the Netherlands

Y2 - 29 November 2002 through 29 November 2002

ER -