@inproceedings{4579934d9cf3433c8776f57a9057d86c,
title = "Single-mask fabrication of temperature triggered MEMS switch for cooling control in SSL system",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "J Wei and H Ye and {van Zeijl}, HW and PM Sarro and GQ Zhang",
year = "2012",
doi = "10.1016/j.proeng.2012.09.280",
language = "English",
publisher = "Elsevier",
pages = "849--852",
editor = "R Walczak and J Dziuban",
booktitle = "Procedia Engineering - Proceedings 26th European Conference on Solid-State Transducers, EUROSENSOR 2012",
note = "Eurosensors XXVI, 9-12 September, 2012, Krak{\'o}w, Poland ; Conference date: 09-09-2012 Through 12-09-2012",
}