Size and Shape Control of Sub-20 nm Patterns Fabricated Using Focused Electron Beam Induced Processing

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	Proc. SPIE 9049, Alternative Lithographic Technologies VI, 90490M
Editors	D.J. Resnick, C Bencher
Place of Publication	s.n.
Publisher	SPIE
Pages	1-4
Number of pages	4
Publication status	Published - 2014
Event	SPIE Conference, San José, California, USA. - s.n. Duration: 23 Feb 2014 → 27 Feb 2014

Name
Publisher	SPIE

Name
Volume	9049

Conference	SPIE Conference, San José, California, USA.
Period	23/02/14 → 27/02/14

Cite this

@inproceedings{b89e1300299a42e082b4e33c9d2a7ed5,

title = "Size and Shape Control of Sub-20 nm Patterns Fabricated Using Focused Electron Beam Induced Processing",

author = "S Hari and CW Hagen and T Verduin and P Kruit",

year = "2014",

language = "English",

publisher = "SPIE",

pages = "1--4",

editor = "D.J. Resnick and C Bencher",

booktitle = "Proc. SPIE 9049, Alternative Lithographic Technologies VI, 90490M",

address = "United States",

note = "SPIE Conference, San Jos{\'e}, California, USA. ; Conference date: 23-02-2014 Through 27-02-2014",

}

Size and Shape Control of Sub-20 nm Patterns Fabricated Using Focused Electron Beam Induced Processing. / Hari, S ; Hagen, CW; Verduin, T et al.
Proc. SPIE 9049, Alternative Lithographic Technologies VI, 90490M. ed. / D.J. Resnick; C Bencher. s.n.: SPIE, 2014. p. 1-4.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Size and Shape Control of Sub-20 nm Patterns Fabricated Using Focused Electron Beam Induced Processing

AU - Hari, S

AU - Hagen, CW

AU - Verduin, T

AU - Kruit, P

PY - 2014

Y1 - 2014

M3 - Conference contribution

SP - 1

EP - 4

BT - Proc. SPIE 9049, Alternative Lithographic Technologies VI, 90490M

A2 - Resnick, D.J.

A2 - Bencher, C

PB - SPIE

CY - s.n.

T2 - SPIE Conference, San José, California, USA.

Y2 - 23 February 2014 through 27 February 2014

ER -