TY - JOUR
T1 - Static capacitive pressure sensing using a single graphene drumg
AU - Davidovikj, Dejan
AU - Scheepers, Paul H.
AU - Van Der Zant, Herre S.J.
AU - Steeneken, Peter G.
N1 - Accepted Author Manuscript
PY - 2017
Y1 - 2017
N2 - To realize nanomechanical graphene-based pressure sensors, it is beneficial to have a method to electrically readout the static displacement of a suspended graphene membrane. Capacitive readout, typical in micro-electromechanical systems, gets increasingly challenging as one starts shrinking the dimensions of these devices because the expected responsivity of such devices is below 0.1 aF/Pa. To overcome the challenges of detecting small capacitance changes, we design an electrical readout device fabricated on top of an insulating quartz substrate, maximizing the contribution of the suspended membrane to the total capacitance of the device. The capacitance of the drum is further increased by reducing the gap size to 110 nm. Using an external pressure load, we demonstrate the successful detection of capacitance changes of a single graphene drum down to 50 aF, and pressure differences down to 25 mbar.
AB - To realize nanomechanical graphene-based pressure sensors, it is beneficial to have a method to electrically readout the static displacement of a suspended graphene membrane. Capacitive readout, typical in micro-electromechanical systems, gets increasingly challenging as one starts shrinking the dimensions of these devices because the expected responsivity of such devices is below 0.1 aF/Pa. To overcome the challenges of detecting small capacitance changes, we design an electrical readout device fabricated on top of an insulating quartz substrate, maximizing the contribution of the suspended membrane to the total capacitance of the device. The capacitance of the drum is further increased by reducing the gap size to 110 nm. Using an external pressure load, we demonstrate the successful detection of capacitance changes of a single graphene drum down to 50 aF, and pressure differences down to 25 mbar.
KW - graphene drum
KW - minimizing parasitic capacitance
KW - nanomechanics
KW - pressure sensor
KW - static capacitive readout
KW - two-dimensional materials
UR - http://resolver.tudelft.nl/uuid:eda80864-cdf3-4f30-a61e-81f3f704974c
UR - http://www.scopus.com/inward/record.url?scp=85038213770&partnerID=8YFLogxK
U2 - 10.1021/acsami.7b17487
DO - 10.1021/acsami.7b17487
M3 - Article
AN - SCOPUS:85038213770
SN - 1944-8244
VL - 9
SP - 43205
EP - 43210
JO - ACS Applied Materials and Interfaces
JF - ACS Applied Materials and Interfaces
IS - 49
ER -