Step coverage of ALD nanolayers on 3D microstructures

HTM Pham; L Constanzo; CR de Boer; PM Sarro

Step coverage of ALD nanolayers on 3D microstructures

HTM Pham, L Constanzo, CR de Boer, PM Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	APCTP-ASEAN workshop on advanced material science and nanotechnology
Editors	H van Nguyen
Place of Publication	Nha Trang, Vietnam
Publisher	Academic press of vietnam academy of science and technology
Pages	547-552
Number of pages	6
ISBN (Print)	978-909023470
Publication status	Published - 2008
Event	APCTP-ASEAN workshop on advanced material science and nanotechnology proceedings, Nha Trang, Vietnam - Nha Trang, Vietnam Duration: 15 Sept 2008 → 20 Sept 2008

Publication series

Name
Publisher	Academic press of vietnam academy of science and technology

Conference

Conference	APCTP-ASEAN workshop on advanced material science and nanotechnology proceedings, Nha Trang, Vietnam
Period	15/09/08 → 20/09/08

Keywords

Elektrotechniek
Techniek
conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{818b3e1e428d4e909bdf5e31f73cb403,

title = "Step coverage of ALD nanolayers on 3D microstructures",

keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",

author = "HTM Pham and L Constanzo and {de Boer}, CR and PM Sarro",

year = "2008",

language = "Undefined/Unknown",

isbn = "978-909023470",

publisher = "Academic press of vietnam academy of science and technology",

pages = "547--552",

editor = "{van Nguyen}, H",

booktitle = "APCTP-ASEAN workshop on advanced material science and nanotechnology",

note = "APCTP-ASEAN workshop on advanced material science and nanotechnology proceedings, Nha Trang, Vietnam ; Conference date: 15-09-2008 Through 20-09-2008",

}

Pham, HTM, Constanzo, L, de Boer, CR & Sarro, PM 2008, Step coverage of ALD nanolayers on 3D microstructures. in H van Nguyen (ed.), APCTP-ASEAN workshop on advanced material science and nanotechnology. Academic press of vietnam academy of science and technology, Nha Trang, Vietnam, pp. 547-552, APCTP-ASEAN workshop on advanced material science and nanotechnology proceedings, Nha Trang, Vietnam, 15/09/08.

Step coverage of ALD nanolayers on 3D microstructures. / Pham, HTM; Constanzo, L; de Boer, CR et al.
APCTP-ASEAN workshop on advanced material science and nanotechnology. ed. / H van Nguyen. Nha Trang, Vietnam: Academic press of vietnam academy of science and technology, 2008. p. 547-552.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Step coverage of ALD nanolayers on 3D microstructures

AU - Pham, HTM

AU - Constanzo, L

AU - de Boer, CR

AU - Sarro, PM

PY - 2008

Y1 - 2008

KW - Elektrotechniek

KW - Techniek

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-909023470

SP - 547

EP - 552

BT - APCTP-ASEAN workshop on advanced material science and nanotechnology

A2 - van Nguyen, H

PB - Academic press of vietnam academy of science and technology

CY - Nha Trang, Vietnam

T2 - APCTP-ASEAN workshop on advanced material science and nanotechnology proceedings, Nha Trang, Vietnam

Y2 - 15 September 2008 through 20 September 2008

ER -