Original languageEnglish
Title of host publicationProceedings 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems
EditorsL Buchaillot, H Zappe
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages329-332
Number of pages4
ISBN (Print)978-146730324-8
DOIs
Publication statusPublished - 2012
EventMEMS 2012, Paris, France - Piscataway, NJ, USA
Duration: 29 Jan 20122 Feb 2012

Publication series

Name
PublisherIEEE

Conference

ConferenceMEMS 2012, Paris, France
Period29/01/122/02/12

ID: 3520064