Stiction-driven sealing of surface micromachined channels

B Morana, G Pandraud, F Santagata, JF Creemer, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publicationProceedings 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems
EditorsL Buchaillot, H Zappe
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages329-332
Number of pages4
ISBN (Print)978-146730324-8
DOIs
Publication statusPublished - 2012
EventMEMS 2012, Paris, France - Piscataway, NJ, USA
Duration: 29 Jan 20122 Feb 2012

Publication series

Name
PublisherIEEE

Conference

ConferenceMEMS 2012, Paris, France
Period29/01/122/02/12

Bibliographical note

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Article number: 6170202

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