Stress and stress gradients in magnetron sputtered TiN layers.

J-D Kamminga, R Delhez, Th.H de Keijser, EJ Mittemeijer

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Conference Proceedings of the Fifth International Conference on Residual Stresses.
Editors	T Ericsson, M Oden, A Anderson
Pages	868-873
Number of pages	6
Publication status	Published - 1998

Cite this

@inproceedings{d08ee2ff9240468abb16ac5089307aee,

title = "Stress and stress gradients in magnetron sputtered TiN layers.",

author = "J-D Kamminga and R Delhez and {de Keijser}, Th.H and EJ Mittemeijer",

year = "1998",

language = "Undefined/Unknown",

isbn = "9172192119",

pages = "868--873",

editor = "T Ericsson and M Oden and A Anderson",

booktitle = "Conference Proceedings of the Fifth International Conference on Residual Stresses.",

}

Stress and stress gradients in magnetron sputtered TiN layers. / Kamminga, J-D; Delhez, R; de Keijser, Th.H et al.
Conference Proceedings of the Fifth International Conference on Residual Stresses.. ed. / T Ericsson; M Oden; A Anderson. 1998. p. 868-873.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Stress and stress gradients in magnetron sputtered TiN layers.

AU - Kamminga, J-D

AU - Delhez, R

AU - de Keijser, Th.H

AU - Mittemeijer, EJ

PY - 1998

Y1 - 1998

M3 - Conference contribution

SN - 9172192119

SP - 868

EP - 873

BT - Conference Proceedings of the Fifth International Conference on Residual Stresses.

A2 - Ericsson, T

A2 - Oden, M

A2 - Anderson, A

ER -