Sub-wavelength metrology using coherent fourier scatterometry

S Roy

Research output: Thesis › Dissertation (TU Delft)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Urbach, H.P., Supervisor Pereira, S.F., Advisor
Award date	21 Mar 2016
Print ISBNs	978-94-6186-613-4
DOIs	https://doi.org/10.4233/uuid:234cb48f-62b3-41e7-bde0-04f0186f52f6
Publication status	Published - 2016

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