Surface versus bulk micromachining: the contest for suitable applications Surface versus bulk micromachining: the contest for suitable applications

PJ French; PM Sarro

Surface versus bulk micromachining: the contest for suitable applications Surface versus bulk micromachining: the contest for suitable applications

Research output: Contribution to journal › Article › Scientific

Original language	Undefined/Unknown
Pages (from-to)	45-53
Number of pages	9
Journal	Journal of Micromechanics and Microengineering
Volume	8
Issue number	2
Publication status	Published - 1998

Keywords

ZX Int.klas.verslagjaar < 2002

Cite this

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title = "Surface versus bulk micromachining: the contest for suitable applications Surface versus bulk micromachining: the contest for suitable applications",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "PJ French and PM Sarro",

year = "1998",

language = "Undefined/Unknown",

volume = "8",

pages = "45--53",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

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}

TY - JOUR

T1 - Surface versus bulk micromachining: the contest for suitable applications Surface versus bulk micromachining: the contest for suitable applications

AU - French, PJ

AU - Sarro, PM

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Y1 - 1998

KW - ZX Int.klas.verslagjaar < 2002

M3 - Article

SN - 0960-1317

VL - 8

SP - 45

EP - 53

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 2

ER -