Suspended graphene beams with tunable gap for squeeze-film pressure sensing

Sten Vollebregt; Robin Dolleman; Herre van der Zant; Peter Steeneken; Lina Sarro

doi:10.1109/TRANSDUCERS.2017.7994162

Suspended graphene beams with tunable gap for squeeze-film pressure sensing

Sten Vollebregt, Robin Dolleman, Herre van der Zant, Peter Steeneken, Lina Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

12 Citations (Scopus)

41 Downloads (Pure)

Abstract

We present suspended graphene pressure sensors fabricated using an innovative surface micro-machining process. The great advantage of this process is that the molybdenum (Mo) catalyst layer for multi-layer graphene chemical vapor deposition (CVD) is also used as a sacrificial layer to suspend the graphene. This method allows for accurate control of the gap size under the beam by simply varying the catalyst thickness. Furthermore, the need for transfer of the graphene layer is eliminated. Using this method, wafer-scale graphene squeeze-film pressure sensors are fabricated and characterized.

Original language	English
Title of host publication	Transducers 2017
Subtitle of host publication	19th International Conference on Solid-State Sensors, Actuators, and Microsystems
Editors	W. Fang, C.P. Hung, S. Shoji
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	770-773
ISBN (Electronic)	978-1-5386-2731-0
ISBN (Print)	978-1-5386-2732-7
DOIs	https://doi.org/10.1109/TRANSDUCERS.2017.7994162
Publication status	Published - 2017
Event	Transducers 2017: 19th International Conference on Solid-State Sensors, Actuators and Microsystems - Kaohsiung, Taiwan Duration: 18 Jun 2017 → 22 Jun 2017

Conference

Conference	Transducers 2017
Abbreviated title	Transducers'17
Country/Territory	Taiwan
City	Kaohsiung
Period	18/06/17 → 22/06/17

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care

Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

Graphene
suspended beam
sonator
squeeze-film effect
pressure sensor

Access to Document

10.1109/TRANSDUCERS.2017.7994162

07994162Final published version, 1.92 MB

http://ieeexplore.ieee.org/abstract/document/7994162/

Cite this

Vollebregt, S., Dolleman, R., van der Zant, H., Steeneken, P., & Sarro, L. (2017). Suspended graphene beams with tunable gap for squeeze-film pressure sensing. In W. Fang, C. P. Hung, & S. Shoji (Eds.), Transducers 2017: 19th International Conference on Solid-State Sensors, Actuators, and Microsystems (pp. 770-773). IEEE. https://doi.org/10.1109/TRANSDUCERS.2017.7994162

@inproceedings{1f3e08bb0bff4246abf1dea6ab3e8b38,

title = "Suspended graphene beams with tunable gap for squeeze-film pressure sensing",

abstract = "We present suspended graphene pressure sensors fabricated using an innovative surface micro-machining process. The great advantage of this process is that the molybdenum (Mo) catalyst layer for multi-layer graphene chemical vapor deposition (CVD) is also used as a sacrificial layer to suspend the graphene. This method allows for accurate control of the gap size under the beam by simply varying the catalyst thickness. Furthermore, the need for transfer of the graphene layer is eliminated. Using this method, wafer-scale graphene squeeze-film pressure sensors are fabricated and characterized.",

keywords = "Graphene, suspended beam, sonator, squeeze-film effect, pressure sensor",

author = "Sten Vollebregt and Robin Dolleman and {van der Zant}, Herre and Peter Steeneken and Lina Sarro",

note = "Green Open Access added to TU Delft Institutional Repository {\textquoteleft}You share, we take care!{\textquoteright} – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.; Transducers 2017 : 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'17 ; Conference date: 18-06-2017 Through 22-06-2017",

year = "2017",

doi = "10.1109/TRANSDUCERS.2017.7994162",

language = "English",

isbn = "978-1-5386-2732-7",

pages = "770--773",

editor = "W. Fang and C.P. Hung and S. Shoji",

booktitle = "Transducers 2017",

publisher = "IEEE",

address = "United States",

}

Vollebregt, S, Dolleman, R, van der Zant, H , Steeneken, P & Sarro, L 2017, Suspended graphene beams with tunable gap for squeeze-film pressure sensing. in W Fang, CP Hung & S Shoji (eds), Transducers 2017: 19th International Conference on Solid-State Sensors, Actuators, and Microsystems. IEEE, Piscataway, NJ, pp. 770-773, Transducers 2017, Kaohsiung, Taiwan, 18/06/17. https://doi.org/10.1109/TRANSDUCERS.2017.7994162

Suspended graphene beams with tunable gap for squeeze-film pressure sensing. / Vollebregt, Sten; Dolleman, Robin; van der Zant, Herre et al.
Transducers 2017: 19th International Conference on Solid-State Sensors, Actuators, and Microsystems. ed. / W. Fang; C.P. Hung; S. Shoji. Piscataway, NJ: IEEE, 2017. p. 770-773.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Suspended graphene beams with tunable gap for squeeze-film pressure sensing

AU - Vollebregt, Sten

AU - Dolleman, Robin

AU - van der Zant, Herre

AU - Steeneken, Peter

AU - Sarro, Lina

N1 - Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

PY - 2017

Y1 - 2017

N2 - We present suspended graphene pressure sensors fabricated using an innovative surface micro-machining process. The great advantage of this process is that the molybdenum (Mo) catalyst layer for multi-layer graphene chemical vapor deposition (CVD) is also used as a sacrificial layer to suspend the graphene. This method allows for accurate control of the gap size under the beam by simply varying the catalyst thickness. Furthermore, the need for transfer of the graphene layer is eliminated. Using this method, wafer-scale graphene squeeze-film pressure sensors are fabricated and characterized.

AB - We present suspended graphene pressure sensors fabricated using an innovative surface micro-machining process. The great advantage of this process is that the molybdenum (Mo) catalyst layer for multi-layer graphene chemical vapor deposition (CVD) is also used as a sacrificial layer to suspend the graphene. This method allows for accurate control of the gap size under the beam by simply varying the catalyst thickness. Furthermore, the need for transfer of the graphene layer is eliminated. Using this method, wafer-scale graphene squeeze-film pressure sensors are fabricated and characterized.

KW - Graphene

KW - suspended beam

KW - sonator

KW - squeeze-film effect

KW - pressure sensor

U2 - 10.1109/TRANSDUCERS.2017.7994162

DO - 10.1109/TRANSDUCERS.2017.7994162

M3 - Conference contribution

SN - 978-1-5386-2732-7

SP - 770

EP - 773

BT - Transducers 2017

A2 - Fang, W.

A2 - Hung, C.P.

A2 - Shoji, S.

PB - IEEE

CY - Piscataway, NJ

T2 - Transducers 2017

Y2 - 18 June 2017 through 22 June 2017

ER -

Suspended graphene beams with tunable gap for squeeze-film pressure sensing

Abstract

Conference

Bibliographical note

Keywords

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Cite this