• B Meester
  • L Reijnen
  • APLM Goossens
  • J Schoonman
Original languageUndefined/Unknown
Title of host publicationProceedings of the Twelfth European Conference on Chemical Vapour Deposition (EuroCVD-12)
EditorsA Figueras
PublisherEDP Sciences
Pages613-620
Number of pages8
Publication statusPublished - 1999

Publication series

Name
PublisherEDP Sciences France
NameThe European Physical Journal. Special Topics
Volume9
ISSN (Print)1155-4339

ID: 2510735