Technology and applications of micromachined adaptive mirrors

G Vdovin, PM Sarro, S Middelhoek

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1-19
Number of pages	19
Journal	Journal of Micromechanics and Microengineering
Volume	9
Publication status	Published - 1999

Keywords

@article{2f3ac7b71333474eb75457523025667f,

title = "Technology and applications of micromachined adaptive mirrors",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "G Vdovin and PM Sarro and S Middelhoek",

year = "1999",

language = "Undefined/Unknown",

volume = "9",

pages = "1--19",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

}