Original languageUndefined/Unknown
Title of host publicationSelected papers on optical MEMS [SPIE milestone series, vol. MS 153]
Editors VM Bright, BJ Thompson
Place of PublicationBellingham
PublisherInternational Society for Optical Engineering
Pages304-312
ISBN (Print)0-8194-3129-X
Publication statusPublished - 1999

    Research areas

  • ZX Int.klas.verslagjaar < 2002

ID: 3076425