@inproceedings{e344af67f33140e1a12c766cd215fb12,
title = "Technology of pixelated reflective membranes for spatial light modulators",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "S Sakarya and G Vdovin and PM Sarro",
year = "1999",
language = "Undefined/Unknown",
isbn = "90-73461-18-9",
publisher = "STW Technology Foundation",
pages = "671--675",
booktitle = "SAFE99: proceedings. ProRISC99: proceedings [CD-ROM]",
note = "2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo ; Conference date: 24-11-1999 Through 25-11-1999",
}