• H van Brug
  • PAAM Somers
Original languageUndefined/Unknown
Title of host publicationInterferometry '99: Techniques and Technologies. International conference on optical metrology.
EditorsMalgorzata Kujawinska, Mitsuo Takeda
PublisherSPIE
Pages358-365
Number of pages8
ISBN (Print)0-8194-3224-5
Publication statusPublished - 1999

Publication series

Name
PublisherSPIE
Name
Volume3744

ID: 1669014