Original language | Undefined/Unknown |
---|---|
Title of host publication | Interferometry '99: Techniques and Technologies. International conference on optical metrology. |
Editors | Malgorzata Kujawinska, Mitsuo Takeda |
Publisher | SPIE |
Pages | 358-365 |
Number of pages | 8 |
ISBN (Print) | 0-8194-3224-5 |
Publication status | Published - 1999 |
Publication series
Name | |
---|---|
Publisher | SPIE |
Name | |
---|---|
Volume | 3744 |