The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film

CA Yuan; AE Flower; O van der Sluis; GQ Zhang; LJ Ernst; M Cherkaoui; WD van Driel

The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film

CA Yuan, AE Flower, O van der Sluis, GQ Zhang, LJ Ernst, M Cherkaoui, WD van Driel

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

Original language	Undefined/Unknown
Title of host publication	Proceedings of EuroSimE 2008
Editors	LJ Ernst, GQ Zhang, WD van Driel, P Rodgers, O de Saint Leger
Place of Publication	Freiburg
Publisher	IEEE Society
Pages	27-30
Number of pages	4
ISBN (Print)	978-1-4244-2127-5
Publication status	Published - 2008
Event	9th international conference on Thermal, mechanical and multi-physics simulation and experiments in micro-electronics and microsystems - Freiburg Duration: 21 Apr 2008 → 23 Apr 2008

Publication series

Name
Publisher	IEEE

Conference

Conference	9th international conference on Thermal, mechanical and multi-physics simulation and experiments in micro-electronics and microsystems
Period	21/04/08 → 23/04/08

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{22c74694c1c648d886679fe24badd5f6,

title = "The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film",

keywords = "Conf.proc. > 3 pag",

author = "CA Yuan and AE Flower and {van der Sluis}, O and GQ Zhang and LJ Ernst and M Cherkaoui and {van Driel}, WD",

year = "2008",

language = "Undefined/Unknown",

isbn = "978-1-4244-2127-5",

publisher = "IEEE Society",

pages = "27--30",

editor = "LJ Ernst and GQ Zhang and {van Driel}, WD and P Rodgers and {de Saint Leger}, O",

booktitle = "Proceedings of EuroSimE 2008",

note = "9th international conference on Thermal, mechanical and multi-physics simulation and experiments in micro-electronics and microsystems ; Conference date: 21-04-2008 Through 23-04-2008",

}

Yuan, CA, Flower, AE, van der Sluis, O, Zhang, GQ, Ernst, LJ, Cherkaoui, M & van Driel, WD 2008, The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film. in LJ Ernst, GQ Zhang, WD van Driel, P Rodgers & O de Saint Leger (eds), Proceedings of EuroSimE 2008. IEEE Society, Freiburg, pp. 27-30, 9th international conference on Thermal, mechanical and multi-physics simulation and experiments in micro-electronics and microsystems, 21/04/08.

The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film. / Yuan, CA; Flower, AE; van der Sluis, O et al.
Proceedings of EuroSimE 2008. ed. / LJ Ernst; GQ Zhang; WD van Driel; P Rodgers; O de Saint Leger. Freiburg: IEEE Society, 2008. p. 27-30.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film

AU - Yuan, CA

AU - Flower, AE

AU - van der Sluis, O

AU - Zhang, GQ

AU - Ernst, LJ

AU - Cherkaoui, M

AU - van Driel, WD

PY - 2008

Y1 - 2008

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-1-4244-2127-5

SP - 27

EP - 30

BT - Proceedings of EuroSimE 2008

A2 - Ernst, LJ

A2 - Zhang, GQ

A2 - van Driel, WD

A2 - Rodgers, P

A2 - de Saint Leger, O

PB - IEEE Society

CY - Freiburg

T2 - 9th international conference on Thermal, mechanical and multi-physics simulation and experiments in micro-electronics and microsystems

Y2 - 21 April 2008 through 23 April 2008

ER -