The role of the TiN liner in forcefill.

GCAM Janssen, JF Jongste, AH Verbruggen, S Radelaar

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	97-99
Number of pages	3
Journal	Electrochemical and Solid-State Letters
Volume	1
Issue number	issue 2
Publication status	Published - 1998

Cite this

@article{c313fd08b66c4eebb708802c327644b9,

title = "The role of the TiN liner in forcefill.",

author = "GCAM Janssen and JF Jongste and AH Verbruggen and S Radelaar",

year = "1998",

language = "Undefined/Unknown",

volume = "1",

pages = "97--99",

journal = "Electrochemical and Solid-State Letters",

issn = "1099-0062",

publisher = "Electrochemical Society, Inc.",

number = "issue 2",

}