The surface transient in Si for SIMS with oblique low-energy o2+ beams.

ZX Jiang, PFA Alkemade

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	125-131
Number of pages	7
Journal	Surface and Interface Analysis
Volume	27
Publication status	Published - 1999

Cite this

@article{2fbe978f8b4747469a4738cb830895cc,

title = "The surface transient in Si for SIMS with oblique low-energy o2+ beams.",

author = "ZX Jiang and PFA Alkemade",

year = "1999",

language = "Undefined/Unknown",

volume = "27",

pages = "125--131",

journal = "Surface and Interface Analysis",

issn = "0142-2421",

publisher = "John Wiley & Sons",

}