Theoretical and experimental investigations on Coulomb interactions in a Two-lens focussed ion beam instrument

J Bi, XR Jiang, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	439-442
Number of pages	4
Journal	Microelectronic Engineering
Volume	35
Issue number	1-4
Publication status	Published - 1997

Cite this

@article{22d5f7797fef4d57908535da67de3a5b,

title = "Theoretical and experimental investigations on Coulomb interactions in a Two-lens focussed ion beam instrument",

author = "J Bi and XR Jiang and P Kruit",

year = "1997",

language = "Undefined/Unknown",

volume = "35",

pages = "439--442",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

number = "1-4",

}